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Keywords: thermal flow sensor
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Proceedings Papers

Proc. ASME. AJKFluids2019, Volume 4: Fluid Measurement and Instrumentation; Micro and Nano Fluid Dynamics, V004T06A015, July 28–August 1, 2019
Publisher: American Society of Mechanical Engineers
Paper No: AJKFluids2019-4606
... Abstract A micromachined thermal flow sensor is presented demonstrating sensing liquid flow rates as low as 2 microliters per minute capable of being used for biomedical applications. These flow sensors rely on the varying electrical resistance of sensors generated by forced convection...