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Keywords: biocompatible
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Proceedings Papers

Proc. ASME. AJKFluids2019, Volume 4: Fluid Measurement and Instrumentation; Micro and Nano Fluid Dynamics, V004T06A015, July 28–August 1, 2019
Publisher: American Society of Mechanical Engineers
Paper No: AJKFluids2019-4606
... at different flow rates. The sensor array presented was constructed using microelectromechanical systems (MEMS) techniques including micro-molding, wet etching and dry etching utilizing biocompatible materials. A numerical model was built using COMSOL multi-physics in order to predict and optimize...