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Proceedings Papers

Simulation of Rarefied Gas Flows in MEMS/NEMS Using a Molecular Method

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Hadi Ghezel Sofloo, Reza Ebrahimi, Alireza Shams
Proc. ASME. FEDSM2009, Volume 1: Symposia, Parts A, B and C, 1039-1044, August 2–6, 2009
Publisher: American Society of Mechanical Engineers
Paper No: FEDSM2009-78015
https://doi.org/10.1115/FEDSM2009-78015
... molecular model and no time counter collision sampling scheme have been used. Applications to micro-scale gas flows include micro-nozzel, nano channel and slider air bearing. The aim is to further test the treatment of pressure boundaries. For slider air bearing gas flows of the computer hard drive...
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Topics: Air bearings, Knudsen number, Microelectromechanical systems, Micronozzles, Nanoelectromechanical systems, Rarefied fluid dynamics, Simulation