Development on Manufacturing Process for Integrating Glass Plates With Microchannel Walls Made by Micro Stereolithography

Micro stereolithography is frequently used to manufacture functional models of microstructured devices and components. However, the products polymerized directly from the micro stereolithography process can significantly distort the imaging wavefront and introduce substantial error into qualitative and quantitative interpretations. The present work focuses on the improvement of optical properties of the product. An open micro channel device was specially designed and the correspondent manufacturing process was also developed. Efforts were mainly made regarding the integration of glass material into the micro structures manufactured by micro stereolithography. Different from the normal micro stereolithography process, a junction between the glass material and polymer micro structures was introduced. The manufactured sample channel was cut and the cut section was imaged by scanning electron microscope (SEM). The deviation on channel dimension and the channel quality in the junction area were studied in this work.