In this work, a Piezo actuated Valveless micropump is proposed for applications in Micro-Total Analysis Systems (μTAS) and Lab-on-a-Chip. Flow rectification in the micropump has been brought about with the use of a diffuser element. The device is fabricated on PDMS-Glass substrate with the glass acting as the diaphragm. A PZT disc is integrated with the setup for actuation. The micropump has been characterized for its dynamic behavior, flow characteristics, and pressure. It was found that the maximum flow rate for the micropump was obtained at low frequency which makes it usable for practical μTAS applications.
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