In this work, the development of a two-dimensional Direct Simulation Monte Carlo (DSMC) Program for pressure boundaries using unstructured cells and its applications to typical micro-scale gas flows are described. For the molecular collision kinetics, variable hard sphere molecular model and no time counter collision sampling scheme have been used. Applications to micro-scale gas flows include micro-nozzel, nano channel and slider air bearing. The aim is to further test the treatment of pressure boundaries. For slider air bearing gas flows of the computer hard drive, the simulated gas pressures, at different rotating speeds, have a very good agreement with previous studies. The applicability of the treatment of pressure boundaries using the equilibrium Maxwell-Boltzmann distribution function was discussed in terms of the magnitude of the local Knudsen number at the pressure boundary for micro-nozzles and slider air bearing applications.
Skip Nav Destination
ASME 2009 Fluids Engineering Division Summer Meeting
August 2–6, 2009
Vail, Colorado, USA
Conference Sponsors:
- Fluids Engineering Division
ISBN:
978-0-7918-4372-7
PROCEEDINGS PAPER
Simulation of Rarefied Gas Flows in MEMS/NEMS Using a Molecular Method Available to Purchase
Hadi Ghezel Sofloo,
Hadi Ghezel Sofloo
K. N. Toosi University of Technology, Tehran, Iran
Search for other works by this author on:
Reza Ebrahimi,
Reza Ebrahimi
K. N. Toosi University of Technology, Tehran, Iran
Search for other works by this author on:
Alireza Shams
Alireza Shams
Sharif University of Technology, Tehran, Iran
Search for other works by this author on:
Hadi Ghezel Sofloo
K. N. Toosi University of Technology, Tehran, Iran
Reza Ebrahimi
K. N. Toosi University of Technology, Tehran, Iran
Alireza Shams
Sharif University of Technology, Tehran, Iran
Paper No:
FEDSM2009-78015, pp. 1039-1044; 6 pages
Published Online:
July 26, 2010
Citation
Ghezel Sofloo, H, Ebrahimi, R, & Shams, A. "Simulation of Rarefied Gas Flows in MEMS/NEMS Using a Molecular Method." Proceedings of the ASME 2009 Fluids Engineering Division Summer Meeting. Volume 1: Symposia, Parts A, B and C. Vail, Colorado, USA. August 2–6, 2009. pp. 1039-1044. ASME. https://doi.org/10.1115/FEDSM2009-78015
Download citation file:
10
Views
Related Proceedings Papers
Related Articles
Numerical Modeling of Micromechanical Devices Using the Direct Simulation Monte Carlo Method
J. Fluids Eng (September,1996)
Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magneto-Microwave Plasma Etching Reactors
J. Fluids Eng (June,2002)
Microelectromechanical System-Based Evaporative Thermal Management of High Heat Flux Electronics
J. Heat Transfer (January,2005)
Related Chapters
Design and Simulation of a Novel Electrostatic Tunable MEMS Inductor for RF Apllications
International Conference on Computer Engineering and Technology, 3rd (ICCET 2011)
Numerical Simulation of the Air Bearing Film in the Head-Disk Interface of Hard Disk Drives by Using Meshless Locall Petrov-Galerkin Method
International Conference on Mechanical and Electrical Technology 2009 (ICMET 2009)
Development of New Measurement Method Applying MEMS Technology for Relative Slip Range During Fretting Fatigue Test in Hydrogen
International Hydrogen Conference (IHC 2016): Materials Performance in Hydrogen Environments