Hydrodynamic cavitation, the explosive growth and catastrophic collapse of vapor bubbles, has immense impact on the design and performance of hydraulic machinery in the macro world. However, cavitation in high-speed microfluidic systems has received scarce attention and hardly been reported. This article reports the presence of hydrodynamic cavitation in the flow of de-ionized water through 11.5–40micron wide rectangular slot micro-orifices entrenched inside 100–200micron wide microchannels. Pioneering experimental investigations on hydrodynamic cavitation in rudimentary microfluidic configurations such as slot micro-orifices has been presented and unique cavitating flow patterns have been identified. Assorted cavitating (two-phase) flow patterns including incipient, choking and supercavitation have been detected. Designers of high-velocity microfluidic systems, especially Power-MEMS devices, need to be aware of the deleterious effects of cavitation as it can significantly affect device performance. The effects of micro-orifice and microchannel size on cavitation have been discussed and results indicate the existence of strong scale effects. Incipient and choking cavitation numbers are observed to increase with increasing micro-orifice size, while the orifice discharge coefficient plummets once cavitation activity erupts. In addition, inlet pressure effects on several cavitation parameters have been discussed and compared with established macro-scale results. The cavitating flow patterns encountered are significantly influenced by the micro-orifice and microchannel size. Flow rate choking occurs irrespective of the inlet pressures and is a direct consequence of cavitation inside the micro-orifice. Cavitation hysteresis is observed but its effects are more marked for the smallest micro-orifice.

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