We have successfully developed a process to manipulate post-growth multi-walled carbon nanotube (MWNT) by AC electrophoresis to form resistive elements and showed that these elements can potentially served as novel sensing elements for micro/nano thermal and anemometry sensing. We have measured the temperature coefficient of resistance (TCR) of these MWNT bundles and integrated them into constant current mode configuration for dynamic characterization. Preliminary experimental measurements showed that the devices could be operated in micro-watt power range for micro thermal and anemometry sensing. This operation range is three orders of magnitude lower than conventional Micro-Electro-Mechanical Systems (MEMS) polysilicon sensors in constant current (CC) mode configuration. In addition, the devices exhibited very fast frequency response (> 100 kHz) in CC mode. Based on these results, we are currently developing polymer-based MWNT embedded sensor for various micro/nano fluidic applications.

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