Experimental Study and Computer Simulation of Heat Transfer for High Flux Cooling Applications With Microchannels in Micro-Electro-Mechanical Systems (MEMS)

This paper aims to apply experiment and computer simulation to investigate heat transfer characteristics of different fluids through microchannels with different geometries. An experimental apparatus with multi-functions, low uncertainties, high precision and temperature control was constructed. The experimental results are compared with the results of computer simulations and theoretical predictions from the conventional laminar flow theory. The flow rate, temperature and pressure drop were measured at steady states to analyse flow characteristics. It was concluded that the effect of allowance for machining of microchannels on heat transfer characteristics could be neglected under lower flow rate. The fluid mass flow rate, the inlet temperature of fluid, and the geometric parameters, particularly the hydraulic diameter and aspect ratio H/W_m in rectangular microchannels were found to have a significant influence on fluid flow and heat transfer characteristics.