Although silicon may generally not be the material of first choice for applications in the field of fluidics for (bio)chemistry and medicine, the extended toolbox of fabrication methods makes it a very attractive material for the demonstration of microfluidic principles for these fields. In particular, the monocrystalline nature of silicon substrates in combination with anisotropic etching processes, the precise dry-etching techniques and sophisticated thin-film surface micromachining processes, can be used to create a large variety of innovative microstructures. Several examples of such micro- and nanofluidic structures for (bio)chemical and medical analysis will be presented and discussed.

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