Sliding Mode Control Application to Amplitude Control of Comb-Actuated Resonant Microscanners

MOEMS (Micro-Opto-Electro-Mechanical System) are MEMS in which the optical part plays a dominant role. The use of MOEMS as scanners and projectors has been studied lately. For high speed scanning applications, electrostatic comb drive actuation has several advantages. In this paper, we demonstrate the application of sliding mode control scheme for amplitude control of comb-actuated resonant microscanners. This method that leads to a simple and practical control function is simply extendable for microscanners with other type of actuation and even for any kind of oscillators that need amplitude control. The functionality and performance of the presented scheme is verified using numerical.