This paper presented the “Top-Down” design of a computational framework for multiphysics simulation and optimization of MEMS devices. This framework couples various existing phenomena-specific single-physics tools-each specialized for a most appropriate physical domain-into an integrated architecture, which allows MEMS designers to predict the behavior of a novel MEMS device and optimize it more exactly and more quickly. The most distinctive feature of the framework is its flexibility on implementing variant coupling strategies, which enables the framework perform the multiphysics simulation much more effective than others. The details of the framework and its implementation are described in this paper.

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