This paper presents a new precision multi-DOF measurement system which has been developed and implemented for the simultaneous measurement of 5DOF motion errors (two linear positions, as well as pitch, roll and yaw) of an X-Y stage. In this paper, the 3DOF laser interferometer was produced by designing the optical path from the one-degrees-of-freedom laser interferometer. The system employs two three-degree-of-freedom interferometers to detect two position errors and three angular errors of the X-Y stage. The experimental setups and measuring procedure and a systematic calculated method for the error verification are presented in the paper. The resolution of measuring the angular errors component is about 0.055 arcsec.
Development of a Laser Based Dual-Axial Five-Degrees-of-Freedom Measurement System for an X-Y Stage
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Jywe, W, Liu, CH, Teng, Y, Chen, C, Shen, J, Hsieh, W, & Wang, Y. "Development of a Laser Based Dual-Axial Five-Degrees-of-Freedom Measurement System for an X-Y Stage." Proceedings of the ASME 8th Biennial Conference on Engineering Systems Design and Analysis. Volume 2: Automotive Systems, Bioengineering and Biomedical Technology, Fluids Engineering, Maintenance Engineering and Non-Destructive Evaluation, and Nanotechnology. Torino, Italy. July 4–7, 2006. pp. 997-1002. ASME. https://doi.org/10.1115/ESDA2006-95572
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