Micro Electro Mechanical Systems (MEMS) are the new and emerging technology of the future and have many applications on different disciplines like biomedical, imaging technology, biology etc. Predicting the dynamic performance and reliability characteristics of such systems early in the design process can impact the quality of the design. This paper presents our modeling, testing, and validation methodologies to predict the dynamic performance of micro systems. A two-dimensional torsional micro scanner mirror is chosen as the case study to demonstrate the developed methodologies. Modeling methodology includes modal analysis of the micro scanner using finite element modeling techniques. The validation methodology uses an experimental modal analysis set-up for measuring the dynamic characteristics of the scanner mirror. The finite element analysis and experimental results are compared to identify the inaccuracies in the modeling assumptions. Additionally, modal damping coefficients are also determined since they are critical to predict the response of such systems to external forces.

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