We report in-plane and through-plane conductivity measurements of dense YSZ films varying in thickness from 20 to 200 nm. In-plane measurements were performed on YSZ films grown on silicon wafers coated with SiO 2 or Si 3 N 4 . Micro-fabricated strips with Pt electrodes in various geometries were used to obtain conductivity as a function of temperature from 200 – 600 °C in a custom-designed micro-probe station. These films have activation energies, which vary from 0.77 to 1.09 eV. Their absolute conductivity is lower compared with other reports. Through-plane and fuel cell measurements were performed by depositing YSZ on a nitrided silicon wafer, then etching through the wafer and depositing porous platinum electrodes on both sides [6,7]. We discuss the electrochemical conduction studies in detail along with fuel cell performance and correlation with electrode microstructure.