Abstract
This work deals with the frequency-amplitude response of the superharmonic resonance of second order of electrostatically actuated clamped NEMS circular plate resonators. The NEMS system consists of a circular plate parallel to a ground plate. Hard excitations (large AC voltage) due to the electrostatic force of frequency near one fourth of the natural frequency of the plate resonator leads the plate into a superharmonic resonance of second order. Hard excitations are excitations significant enough to produce resonance although far from the primary resonance zone. There is no DC component in the voltage applied. For the partial differential equation of motion two reduced order models are developed. The first one uses one mode of vibration and it is solved using the Method of Multiple Scales (MMS), and the frequency-amplitude response is predicted. Hard excitations were modeled by keeping the first term of the Taylor polynomial of the electrostatic force as a large term. The second model uses two modes of vibration, and it is solved using numerical integration. This produces time responses of the resonator. In this work, the quantum dynamics effect such as Casimir effect is considered significant. The two branches, one unstable and one stable, with a saddle node bifurcation point are predicted. Both methods are in agreement for amplitudes up to 0.7 of the gap. The effect of damping and voltage on the frequency response are reported.
