This paper investigates the dynamics governing the behavior of electrostatically actuated MEMS cantilever resonators. The cantilever is held parallel to a ground plate (electrode) with an AC voltage between the plate and the electrode causing the electrostatic actuation (excitation). For the purposes of this paper this is soft excitation. The frequency of the excitation is near the natural frequency of the cantilever leading to what is known as parametric resonance. The electrostatic force in the problem investigated throughout the paper is nonlinear in nature and includes the fringe effect. Two methods are used in investigating this problem: the method of multiple scales (MMS) and the homotopy perturbation method (HPM). The two methods work well for small non-linearities and small amplitudes. The influence of voltage, fringe, damping, Casimir, and Van der Waals parameters will be investigated in this paper using MMS and HPM as a means of verifying the results obtained.
- Dynamic Systems and Control Division
Parametric Resonance of Electrostatically Actuated MEMS Cantilever Resonators Using Method of Multiple Scales and Homotopy Perturbation Method
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Reyes, C, & Caruntu, DI. "Parametric Resonance of Electrostatically Actuated MEMS Cantilever Resonators Using Method of Multiple Scales and Homotopy Perturbation Method." Proceedings of the ASME 2017 Dynamic Systems and Control Conference. Volume 3: Vibration in Mechanical Systems; Modeling and Validation; Dynamic Systems and Control Education; Vibrations and Control of Systems; Modeling and Estimation for Vehicle Safety and Integrity; Modeling and Control of IC Engines and Aftertreatment Systems; Unmanned Aerial Vehicles (UAVs) and Their Applications; Dynamics and Control of Renewable Energy Systems; Energy Harvesting; Control of Smart Buildings and Microgrids; Energy Systems. Tysons, Virginia, USA. October 11–13, 2017. V003T32A004. ASME. https://doi.org/10.1115/DSCC2017-5124
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