Arbitrary-Order Iterative Learning Control Considering H_∞ Synthesis

Iterative learning control (ILC) is an effective technique to improve the tracking performance of systems through adjusting the feedforward control signal based on the memory data. It is critically important to design the learning filters in the ILC algorithm that assures the robust stability of the convergence of tracking errors from one iteration to next. The design procedure usually involves lots of tuning work especially in high-order ILC. To facilitate this procedure, this paper proposes an approach to design learning filters for an arbitrary-order ILC with guaranteed convergence and ease of tuning. The filter design problem is formulated into an H_∞ optimal control problem. This approach is based on an infinite impulse response (IIR) system and conducted directly in iteration-frequency domain. Important characteristics of the proposed approach are explored and demonstrated on a simulated wafer scanning system.