RF MEMS switches have many advantages over solid-state switches but their main disadvantage is poor reliability. The reliability problem stems from the impact forces generated at the time of closing of the switch and subsequent bouncing. This paper proposes a feedback control strategy to rapidly close the switch without bouncing. The stiffness of the system is switched between a positive value and a negative value to achieve small rise and setting times with no overshoot. Simulation results are presented to demonstrate the feasibility of the proposed control strategy.

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