In this paper we study the origins of the cross coupling phenomenon in MEMS nanopositioners with a parallel kinematic mechanism. An analytical model is provided for a generic 2-DOF MEMS nanopositioner. The model accounts for the potential mechanical asymmetries present in the device due to micro-fabrication imperfections. Simulations are performed based on the obtained model and compared with experimental data from a previously reported MEMS nanopositioner. A close agreement is observed between the analytical and experimental results, leading to a better understanding of the phenomenon.
- Dynamic Systems and Control Division
Cross Coupling in Parallel Kinematic MEMS Nanopositioners
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Maroufi, M, & Moheimani, SOR. "Cross Coupling in Parallel Kinematic MEMS Nanopositioners." Proceedings of the ASME 2015 Dynamic Systems and Control Conference. Volume 3: Multiagent Network Systems; Natural Gas and Heat Exchangers; Path Planning and Motion Control; Powertrain Systems; Rehab Robotics; Robot Manipulators; Rollover Prevention (AVS); Sensors and Actuators; Time Delay Systems; Tracking Control Systems; Uncertain Systems and Robustness; Unmanned, Ground and Surface Robotics; Vehicle Dynamics Control; Vibration and Control of Smart Structures/Mech Systems; Vibration Issues in Mechanical Systems. Columbus, Ohio, USA. October 28–30, 2015. V003T52A006. ASME. https://doi.org/10.1115/DSCC2015-9824
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