In this paper we study the origins of the cross coupling phenomenon in MEMS nanopositioners with a parallel kinematic mechanism. An analytical model is provided for a generic 2-DOF MEMS nanopositioner. The model accounts for the potential mechanical asymmetries present in the device due to micro-fabrication imperfections. Simulations are performed based on the obtained model and compared with experimental data from a previously reported MEMS nanopositioner. A close agreement is observed between the analytical and experimental results, leading to a better understanding of the phenomenon.

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