This paper deals with electrostatically actuated MEMS plates. The model consists of a flexible MEMS plate above a parallel ground plate. An AC voltage of frequency near natural frequency of the plate provides the electrostatic force that actuates the flexible MEMS plate. This leads to parametric resonance. The effect of Casimir and/or van der Waals forces on the voltage-amplitude response of the plate is investigated.
- Dynamic Systems and Control Division
Casimir and Van der Waals Effects on Voltage Response of Electrostatically Actuated MEMS/NEMS Plates
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Caruntu, DI, Oyervides, R, & Garcia, V. "Casimir and Van der Waals Effects on Voltage Response of Electrostatically Actuated MEMS/NEMS Plates." Proceedings of the ASME 2015 Dynamic Systems and Control Conference. Volume 2: Diagnostics and Detection; Drilling; Dynamics and Control of Wind Energy Systems; Energy Harvesting; Estimation and Identification; Flexible and Smart Structure Control; Fuels Cells/Energy Storage; Human Robot Interaction; HVAC Building Energy Management; Industrial Applications; Intelligent Transportation Systems; Manufacturing; Mechatronics; Modelling and Validation; Motion and Vibration Control Applications. Columbus, Ohio, USA. October 28–30, 2015. V002T25A001. ASME. https://doi.org/10.1115/DSCC2015-9775
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