This paper deals with electrostatically actuated microelectromechanical (MEMS) cantilever resonators under soft AC double actuation. The cantilever is between two parallel ground plates. The two AC frequencies are one near half natural frequency, and the other near natural frequency. There is a phase difference between the two voltages. The system undergoes a simultaneous resonance. The voltage-amplitude response is investigated. The effects of the second voltage, phase difference between voltages, and frequency on the response are reported. The method of multiple scales is used in this paper.
- Dynamic Systems and Control Division
Simultaneous Resonance of Soft AC Doubly Actuated MEMS Resonators
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Caruntu, DI, & Reyes, C. "Simultaneous Resonance of Soft AC Doubly Actuated MEMS Resonators." Proceedings of the ASME 2014 Dynamic Systems and Control Conference. Volume 3: Industrial Applications; Modeling for Oil and Gas, Control and Validation, Estimation, and Control of Automotive Systems; Multi-Agent and Networked Systems; Control System Design; Physical Human-Robot Interaction; Rehabilitation Robotics; Sensing and Actuation for Control; Biomedical Systems; Time Delay Systems and Stability; Unmanned Ground and Surface Robotics; Vehicle Motion Controls; Vibration Analysis and Isolation; Vibration and Control for Energy Harvesting; Wind Energy. San Antonio, Texas, USA. October 22–24, 2014. V003T50A005. ASME. https://doi.org/10.1115/DSCC2014-6313
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