This paper presents a new silicon-on-insulator-based MEMS nanopositioner that is designed for high-speed on-chip atomic force microscopy (AFM). The device features four electrostatic actuators in a 2-DOF configuration that allows bidirectional actuation of a central stage along two orthogonal axes with displacements greater than ±10μm. The x- and y-axis resonant modes of the stage are located at 1274Hz and 1286Hz, respectively. Integrated electrothermal sensors are used to control the system in closed loop, with a damping controller and an internal model controller being implemented for each axis. The performance of the closed-loop system is demonstrated by performing a 20μm×20μm contact-mode AFM scan via a Lissajous scan trajectory with a 410Hz sinusoidal reference.
- Dynamic Systems and Control Division
MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy
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Fowler, AG, Maroufi, M, Bazaei, A, & Moheimani, SOR. "MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy." Proceedings of the ASME 2014 Dynamic Systems and Control Conference. Volume 3: Industrial Applications; Modeling for Oil and Gas, Control and Validation, Estimation, and Control of Automotive Systems; Multi-Agent and Networked Systems; Control System Design; Physical Human-Robot Interaction; Rehabilitation Robotics; Sensing and Actuation for Control; Biomedical Systems; Time Delay Systems and Stability; Unmanned Ground and Surface Robotics; Vehicle Motion Controls; Vibration Analysis and Isolation; Vibration and Control for Energy Harvesting; Wind Energy. San Antonio, Texas, USA. October 22–24, 2014. V003T44A004. ASME. https://doi.org/10.1115/DSCC2014-6044
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