This paper presents the dynamics modeling and dynamic identification of a dual-blade wafer handling robot. An explicit form dynamic model for this 8-link parallel robot is proposed. The dynamic model is transformed into a decoupled form to enable dynamic parameters identification with least-square regression. A well conditioned trajectory is chosen for identification experiment. Both viscous friction and Coulomb friction are considered to make the model more reliable. Model has been validated by experiments.
Volume Subject Area:
Robotics and Manipulators
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