We present the design and fabrication of a Micro-Electro-Mechanical Systems based piezoresistive cantilever force sensor as a potential candidate for micro/nano indentation of biological specimens such as cells and tissues. The fabricated force sensor consists of a silicon cantilever beam with a p-type piezoresistor and a cylindrical probing tip made from SU-8 polymer. One of the key features of the sensor is that a standard silicon wafer is used to make silicon-on-insulator (SOI), thereby reducing the cost of fabrication. To make SOI from standard silicon wafer the silicon film was sputtered on an oxidized silicon wafer and annealed at 1050 °C so as to obtain polycrystalline silicon. The sputtered silicon layer was used to fabricate the cantilever beam. The as-deposited and annealed silicon films were experimentally characterized using X-ray diffraction (XRD) and Atomic Force Microscopy (AFM). The annealed silicon film was polycrystalline with a low surface roughness of 3.134 nm (RMS value).
- Dynamic Systems and Control Division
A Microscale Piezoresistive Force Sensor for Nanoindentation of Biological Cells and Tissues
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Pandya, HJ, Kim, HT, & Desai, JP. "A Microscale Piezoresistive Force Sensor for Nanoindentation of Biological Cells and Tissues." Proceedings of the ASME 2013 Dynamic Systems and Control Conference. Volume 2: Control, Monitoring, and Energy Harvesting of Vibratory Systems; Cooperative and Networked Control; Delay Systems; Dynamical Modeling and Diagnostics in Biomedical Systems; Estimation and Id of Energy Systems; Fault Detection; Flow and Thermal Systems; Haptics and Hand Motion; Human Assistive Systems and Wearable Robots; Instrumentation and Characterization in Bio-Systems; Intelligent Transportation Systems; Linear Systems and Robust Control; Marine Vehicles; Nonholonomic Systems. Palo Alto, California, USA. October 21–23, 2013. V002T29A003. ASME. https://doi.org/10.1115/DSCC2013-3994
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