Precision Control Through Vibration Suppression in Piezoelectric-Stepper Response Available to Purchase

The main contribution of this article is to show that, when compared to single actuator steppers, the response of multi-actuator steppers can be significantly less oscillatory and these reduced oscillations allow for higher precision velocity control of a motion stage. Moreover, it is shown that the resulting motion of the motion stage is stable using a Poincaré-map approach.