Smart structures technology that uses materials such as piezoelectric elements, etc. is effective for controlling vibration in small devices. However, for micro devices, it is difficult to experimentally measure and evaluate the vibration control characteristics of the system because of the microscopic scale. Namely, it is not realistic to install an external exciter or to apply the excitation force using an impulse hammer. Therefore, in this study, the vibration property is measured and evaluated using non-contact technologies for excitation and measurement; namely, laser ablation for the excitation and a laser Doppler vibrometer as the measurement device. Since both the input excitation and the output measurement are accomplished without contact and the excitation force is easily reproducible in the same system, this technique can be used repeatedly and the measurement can be improved.

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