In this paper, we present significant improvements to a scanning probe microscope (SPM) modeling technique that uses the SPM’s probe-surface interaction signal to model the lateral dynamics of the SPM. The fundamental idea behind this modeling method is to use the topography signal resulting from a sinusoidal scan of a known calibration surface to develop a transfer function model of the AFM dynamics. This method is useful in situations where sensors are either unavailable, insufficient, or require independent calibration. The method is experimentally implemented to model a commercial atomic force microscope system (AFM).

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