In this paper, we present significant improvements to a scanning probe microscope (SPM) modeling technique that uses the SPM’s probe-surface interaction signal to model the lateral dynamics of the SPM. The fundamental idea behind this modeling method is to use the topography signal resulting from a sinusoidal scan of a known calibration surface to develop a transfer function model of the AFM dynamics. This method is useful in situations where sensors are either unavailable, insufficient, or require independent calibration. The method is experimentally implemented to model a commercial atomic force microscope system (AFM).
- Dynamic Systems and Control Division
Improved Probe-Sample Signal Based Modeling of Scanning Probe Microscopes
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Maxwell, B, Okorafor, MK, & Clayton, GM. "Improved Probe-Sample Signal Based Modeling of Scanning Probe Microscopes." Proceedings of the ASME 2012 5th Annual Dynamic Systems and Control Conference joint with the JSME 2012 11th Motion and Vibration Conference. Volume 2: Legged Locomotion; Mechatronic Systems; Mechatronics; Mechatronics for Aquatic Environments; MEMS Control; Model Predictive Control; Modeling and Model-Based Control of Advanced IC Engines; Modeling and Simulation; Multi-Agent and Cooperative Systems; Musculoskeletal Dynamic Systems; Nano Systems; Nonlinear Systems; Nonlinear Systems and Control; Optimal Control; Pattern Recognition and Intelligent Systems; Power and Renewable Energy Systems; Powertrain Systems. Fort Lauderdale, Florida, USA. October 17–19, 2012. pp. 567-573. ASME. https://doi.org/10.1115/DSCC2012-MOVIC2012-8848
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