In order to enable the high-speed control of scanning probe microscopes (SPMs), a model of the SPM nanopositioner must typically be acquired. Modeling of SPM systems is difficult due to issues with external nanoposition sensor resolution, integration, and availability. In order to overcome these problems, a method capable of finding a model of the SPM nanopositioner using only the SPM’s existing imaging capabilities is presented. In this method, images acquired using a known spiral input trajectory are analyzed to determine the amplitude and phase of the output signal, which can be used to determine the magnitude and phase of a transfer function model. The method is presented, followed by simulations and preliminary experiments that show the validity of the approach.

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