In order to enable the high-speed control of scanning probe microscopes (SPMs), a model of the SPM nanopositioner must typically be acquired. Modeling of SPM systems is difficult due to issues with external nanoposition sensor resolution, integration, and availability. In order to overcome these problems, a method capable of finding a model of the SPM nanopositioner using only the SPM’s existing imaging capabilities is presented. In this method, images acquired using a known spiral input trajectory are analyzed to determine the amplitude and phase of the output signal, which can be used to determine the magnitude and phase of a transfer function model. The method is presented, followed by simulations and preliminary experiments that show the validity of the approach.
- Dynamic Systems and Control Division
Image-Based Modeling of a Scanning Probe Microscope Using a Spiral Scan
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McManus, B, & Clayton, GM. "Image-Based Modeling of a Scanning Probe Microscope Using a Spiral Scan." Proceedings of the ASME 2012 5th Annual Dynamic Systems and Control Conference joint with the JSME 2012 11th Motion and Vibration Conference. Volume 2: Legged Locomotion; Mechatronic Systems; Mechatronics; Mechatronics for Aquatic Environments; MEMS Control; Model Predictive Control; Modeling and Model-Based Control of Advanced IC Engines; Modeling and Simulation; Multi-Agent and Cooperative Systems; Musculoskeletal Dynamic Systems; Nano Systems; Nonlinear Systems; Nonlinear Systems and Control; Optimal Control; Pattern Recognition and Intelligent Systems; Power and Renewable Energy Systems; Powertrain Systems. Fort Lauderdale, Florida, USA. October 17–19, 2012. pp. 553-560. ASME. https://doi.org/10.1115/DSCC2012-MOVIC2012-8701
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