This paper investigates the influence of nonlinearities resulting from parametric soft AC electrostatic excitation on the response of cantilever micro-beams near primary resonance. Most of the analysis in literature investigates pull-in phenomenon, stability, amplitude–frequency relations, or finds time responses of such systems. This work uses Reduced Order Model method and shows that the steady-state amplitudes in the amplitude-voltage response are higher than predicted by the Method of Multiple Scales, which is a perturbation method. This result is extremely important for predicting pull-in phenomenon and level of amplitudes at resonance.

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