Reduced Order Model for Amplitude-Voltage Response of MEMS Cantilever Resonators Under Soft AC Near Natural Frequency

This paper investigates the influence of nonlinearities resulting from parametric soft AC electrostatic excitation on the response of cantilever micro-beams near primary resonance. Most of the analysis in literature investigates pull-in phenomenon, stability, amplitude–frequency relations, or finds time responses of such systems. This work uses Reduced Order Model method and shows that the steady-state amplitudes in the amplitude-voltage response are higher than predicted by the Method of Multiple Scales, which is a perturbation method. This result is extremely important for predicting pull-in phenomenon and level of amplitudes at resonance.