This paper investigates the influence of nonlinearities resulting from parametric soft AC electrostatic excitation on the response of cantilever micro-beams near primary resonance. Most of the analysis in literature investigates pull-in phenomenon, stability, amplitude–frequency relations, or finds time responses of such systems. This work uses Reduced Order Model method and shows that the steady-state amplitudes in the amplitude-voltage response are higher than predicted by the Method of Multiple Scales, which is a perturbation method. This result is extremely important for predicting pull-in phenomenon and level of amplitudes at resonance.
- Dynamic Systems and Control Division
Reduced Order Model for Amplitude-Voltage Response of MEMS Cantilever Resonators Under Soft AC Near Natural Frequency
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Caruntu, DI, Martinez, I, & Knecht, MW. "Reduced Order Model for Amplitude-Voltage Response of MEMS Cantilever Resonators Under Soft AC Near Natural Frequency." Proceedings of the ASME 2012 5th Annual Dynamic Systems and Control Conference joint with the JSME 2012 11th Motion and Vibration Conference. Volume 2: Legged Locomotion; Mechatronic Systems; Mechatronics; Mechatronics for Aquatic Environments; MEMS Control; Model Predictive Control; Modeling and Model-Based Control of Advanced IC Engines; Modeling and Simulation; Multi-Agent and Cooperative Systems; Musculoskeletal Dynamic Systems; Nano Systems; Nonlinear Systems; Nonlinear Systems and Control; Optimal Control; Pattern Recognition and Intelligent Systems; Power and Renewable Energy Systems; Powertrain Systems. Fort Lauderdale, Florida, USA. October 17–19, 2012. pp. 251-256. ASME. https://doi.org/10.1115/DSCC2012-MOVIC2012-8829
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