This paper deals with the nonlinear response of electrostatically actuated MEMS cantilever resonator under soft DC voltage and soft AC voltage of frequency near natural frequency. The mathematical model of the system is obtained using Lagrange equations. The equations of motion are nondimensionalized and then the method of multiple scales is used to investigate the voltage-amplitude response of the resonator. The influence of the soft DC voltage, fringe effect, and damping on the voltage-amplitude response are reported.
- Dynamic Systems and Control Division
Amplitude-Voltage Response of MEMS Cantilever Resonators Under Soft DC-AC Voltage Near Natural Frequency
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Caruntu, DI, & Taylor, KN. "Amplitude-Voltage Response of MEMS Cantilever Resonators Under Soft DC-AC Voltage Near Natural Frequency." Proceedings of the ASME 2012 5th Annual Dynamic Systems and Control Conference joint with the JSME 2012 11th Motion and Vibration Conference. Volume 2: Legged Locomotion; Mechatronic Systems; Mechatronics; Mechatronics for Aquatic Environments; MEMS Control; Model Predictive Control; Modeling and Model-Based Control of Advanced IC Engines; Modeling and Simulation; Multi-Agent and Cooperative Systems; Musculoskeletal Dynamic Systems; Nano Systems; Nonlinear Systems; Nonlinear Systems and Control; Optimal Control; Pattern Recognition and Intelligent Systems; Power and Renewable Energy Systems; Powertrain Systems. Fort Lauderdale, Florida, USA. October 17–19, 2012. pp. 245-250. ASME. https://doi.org/10.1115/DSCC2012-MOVIC2012-8828
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