This paper deals with the nonlinear response of electrostatically actuated MEMS cantilever resonator under soft DC voltage and soft AC voltage of frequency near natural frequency. The mathematical model of the system is obtained using Lagrange equations. The equations of motion are nondimensionalized and then the method of multiple scales is used to investigate the voltage-amplitude response of the resonator. The influence of the soft DC voltage, fringe effect, and damping on the voltage-amplitude response are reported.

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