A parameterized model for the impact dynamics of a piezoelectric microactuator is proposed, and a system identification procedure for quantifying model parameters presented. The proposed model incorporates squeeze-film damping, adhesion, and coefficient-of-restitution effects. Following parameter quantification from sample data of bouncing impacts and progressive ramped-square-wave inputs, the model is found to be effective at predicting the time response of the actuator to a range of square wave and sinusoidal input. Presence, absence, and quantity of bounces upon impact is successfully predicted, while error in oscillation amplitudes and contact durations range from 1–25% over many test cases of periodic inputs between 5 and 100 Hz.

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