Force sensing is an important component for a number of surgical procedures as it can help to prevent undesirable damage to the tissue and at the same time provides the surgeons with a better “feel” of the tool-tissue interaction. However, most of the current commercially available multi-DOF force sensors are relatively large in size and it is a challenge to incorporate them into the surgical tool. Hence, a multi-DOF miniature force sensor is desired and this paper presents the design and development of a miniature 2-DOF force sensor. In order to achieve a miniature force sensor, microfabrication technique is used and the proposed force sensor is a capacitive-based sensor. The proposed force sensor can be used in a number of percutaneous procedures as well as catheter-based procedures. This paper presents the design and microfabrication process of the proposed miniature force sensor.

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