Improved Modeling of a Dynamic Mirror With Antagonistic Piezoelectric Stack Actuation

An enhanced model of a dynamic mirror actuator (DMA) for laser beam steering is presented. The DMA is driven by an antagonistic pair of piezoelectric stack actuators (PESA). The proposed model of the DMA employs explicit PESA charging dynamics and an adjustable PESA shunt circuit to address the frequency-dependent effective mechanical compliance term in several previous models from literature. The proposed DMA model with shunt circuit accurately predicts the first damped natural frequency of the DMA with a shunt circuit across each PESA. Simulation and experimental data are presented. Good agreement is shown between the predicted and measured damped first natural frequencies.