This review examines recent results on analytical modeling of electrostatic MEMS. Such modeling can include multiple coupled physics domains, including electrostatic forces, and lumped circuit models, structural elasticity, rigid body dynamics, or fluid mechanics. This review focuses on analytical models that provide the benefits of a closed-form expression trade rather than strive for the highest degree of accuracy for. Such models have been used successfully for parametric design, synthesis of dynamical models, and development of control laws. This review considers the role of mathematical modeling in several traditional and emerging areas for electrostatic MEMS: 1) analysis of pull-in, 2) effects of parasitics, 3) parametric resonance, 4) movable gate transistor or NEMFETs, and 5) repulsive actuation.
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ASME 2010 Dynamic Systems and Control Conference
September 12–15, 2010
Cambridge, Massachusetts, USA
Conference Sponsors:
- Dynamic Systems and Control Division
ISBN:
978-0-7918-4418-2
PROCEEDINGS PAPER
Mathematical Modeling of Electrostatic MEMS Actuators: A Review Available to Purchase
I. P. M. Wickramasinghe,
I. P. M. Wickramasinghe
Texas Tech University, Lubbock, TX
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Jordan M. Berg
Jordan M. Berg
Texas Tech University, Lubbock, TX
Search for other works by this author on:
I. P. M. Wickramasinghe
Texas Tech University, Lubbock, TX
Jordan M. Berg
Texas Tech University, Lubbock, TX
Paper No:
DSCC2010-4299, pp. 35-42; 8 pages
Published Online:
January 25, 2011
Citation
Wickramasinghe, IPM, & Berg, JM. "Mathematical Modeling of Electrostatic MEMS Actuators: A Review." Proceedings of the ASME 2010 Dynamic Systems and Control Conference. ASME 2010 Dynamic Systems and Control Conference, Volume 2. Cambridge, Massachusetts, USA. September 12–15, 2010. pp. 35-42. ASME. https://doi.org/10.1115/DSCC2010-4299
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