A novel thin-film piezoelectric vertical actuator with integrated strain gage position sensor is described, with sensor performance in simulated sliding mode control examined. The actuator utilizes four bending-beam thin-film lead-zirconate-titanate (PZT) legs to generate net translational out-of-plane motion of almost 100 μm, with higher speed and lower voltages than most MEMS vertical actuators. In addition, a portion of the top platinum electrode on the piezoelectric thin-film is used to perform position sensing, and shown to have good sensitivity during experimental operation of the actuator. A dynamic model of the stage based on a hysteresis model derived to fit experimental piezoelectric strain coefficient behavior is presented, and used to predict stage performance during sliding mode control using the integrated strain gage.
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ASME 2010 Dynamic Systems and Control Conference
September 12–15, 2010
Cambridge, Massachusetts, USA
Conference Sponsors:
- Dynamic Systems and Control Division
ISBN:
978-0-7918-4418-2
PROCEEDINGS PAPER
Dynamics, Sensing, and Control of a Thin-Film Piezoelectric Vertical Micro-Stage
Kenn Oldham,
Kenn Oldham
University of Michigan, Ann Arbor, MI
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Xianke Lin,
Xianke Lin
University of Michigan, Ann Arbor, MI
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Thomas Wang,
Thomas Wang
University of Michigan, Ann Arbor, MI
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Jeffrey S. Pulskamp,
Jeffrey S. Pulskamp
U.S. Army Research Laboratory, Adelphi, MD
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Ronald G. Polcawich
Ronald G. Polcawich
U.S. Army Research Laboratory, Adelphi, MD
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Kenn Oldham
University of Michigan, Ann Arbor, MI
Xianke Lin
University of Michigan, Ann Arbor, MI
Zhen Qiu
University of Michigan, Ann Arbor, MI
Thomas Wang
University of Michigan, Ann Arbor, MI
Jeffrey S. Pulskamp
U.S. Army Research Laboratory, Adelphi, MD
Ronald G. Polcawich
U.S. Army Research Laboratory, Adelphi, MD
Paper No:
DSCC2010-4175, pp. 111-118; 8 pages
Published Online:
January 25, 2011
Citation
Oldham, K, Lin, X, Qiu, Z, Wang, T, Pulskamp, JS, & Polcawich, RG. "Dynamics, Sensing, and Control of a Thin-Film Piezoelectric Vertical Micro-Stage." Proceedings of the ASME 2010 Dynamic Systems and Control Conference. ASME 2010 Dynamic Systems and Control Conference, Volume 2. Cambridge, Massachusetts, USA. September 12–15, 2010. pp. 111-118. ASME. https://doi.org/10.1115/DSCC2010-4175
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