Three methods of minimizing error between the transient response of a dynamic system with parameter variation and its nominal open-loop dynamics are tested on a second-order example system of a piezoelectric microactuator. The example system is a piezoelectrically actuated silicon flexure intended for use in micro-robotic systems. Polymer and silicon layers are to be stacked on top of the original flexure to increase out-of-plane weight-bearing capacity, but this process is subject to substantial alignment error. The procedures evaluated in this paper seek target stiffness and damping coefficients that minimize error in open-loop actuator motion. The first method is based on simple damping ratio and natural frequency calculations, while the second and third methods are based on state-space and transfer function models, respectively. All three approaches reduce error in transient dynamics compared to nominal designs based solely on static weight-bearing or fabrication considerations, with the state-based being identified as usable to a wide range of systems, although the ability to reduce sensitivity to model variation in purely open-loop operation is limited.
- Dynamic Systems and Control Division
Robust Design of a Micro-Electromechanical System in the Presence of Assembly Uncertainty
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Rhee, C, & Oldham, K. "Robust Design of a Micro-Electromechanical System in the Presence of Assembly Uncertainty." Proceedings of the ASME 2010 Dynamic Systems and Control Conference. ASME 2010 Dynamic Systems and Control Conference, Volume 2. Cambridge, Massachusetts, USA. September 12–15, 2010. pp. 1-8. ASME. https://doi.org/10.1115/DSCC2010-4004
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