This paper presents, reviews, compares, and analyzes optimal-control methods for designing two-degree-of-freedom (2DOF) control laws for nanopositioning. The different methods are motivated by various practical scenarios and difficulty in achieving simultaneously multiple performance objectives of resolution, bandwidth, and robustness by tuning-based or shaping-of-open-loop-plants based designs. In this context, we study fundamental trade-offs between these performance objectives in 2DOF control designs for nanopositioning systems. In particular, in terms of the trade-offs, our analysis shows that the primary role of feedback is providing robustness to the closed-loop device whereas the feedforward component is mainly effective in overcoming fundamental algebraic constraints that limit the feedback-only designs. Experimental results indicate substantial improvements (over 200% in bandwidth) when compared to optimal feedback-only controllers.
- Dynamic Systems and Control Division
Optimal-Control Methods for Design of Two-Degree-Freedom Systems for Nanopositioning
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Lee, C, & Salapaka, S. "Optimal-Control Methods for Design of Two-Degree-Freedom Systems for Nanopositioning." Proceedings of the ASME 2009 Dynamic Systems and Control Conference. ASME 2009 Dynamic Systems and Control Conference, Volume 2. Hollywood, California, USA. October 12–14, 2009. pp. 589-596. ASME. https://doi.org/10.1115/DSCC2009-2784
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