To reduce the cost and improve the speed of Atomic Force Microscopy (AFM) in molecular scale imaging of materials, we propose a laser-free AFM scheme augmented with an accurate control strategy for its scanning axes. It employs a piezoresistive sensing device with a high level of accuracy to avoid using the bulky and expensive laser interferometer. Change in the resistance of piezoelectric layer due to the deflection of microcantilever caused by the variation of surface topography is monitored through a Wheatstone bridge. Hence, it captures the surface topography without the use of laser and with nanometer scale accuracy. To improve the speed of imaging, however, a Lyapunov-based robust adaptive control strategy is implemented in the 2-DOF scanning stage. It has been demonstrated in an earlier publication that this control framework has superior performance over the conventional PID controllers typically used in commercial AFMs. The paper, then, demonstrates a set of experiments on a standard AFM calibration sample with 200 nm stepped topography. Results indicate accurate imaging of the sample up to the frequency of 30 Hz, for a 16μm×16μm scanning area, proving the feasibility of less costly and high speed AFM-based metrology.
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ASME 2009 Dynamic Systems and Control Conference
October 12–14, 2009
Hollywood, California, USA
Conference Sponsors:
- Dynamic Systems and Control Division
ISBN:
978-0-7918-4892-0
PROCEEDINGS PAPER
Development of a High-Speed Laser-Free Atomic Force Microscopy Available to Purchase
Saeid Bashash,
Saeid Bashash
Clemson University, Clemson, SC
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Reza Saeidpourazar,
Reza Saeidpourazar
Clemson University, Clemson, SC
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Nader Jalili
Nader Jalili
Clemson University, Clemson, SC
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Saeid Bashash
Clemson University, Clemson, SC
Reza Saeidpourazar
Clemson University, Clemson, SC
Nader Jalili
Clemson University, Clemson, SC
Paper No:
DSCC2009-2742, pp. 789-794; 6 pages
Published Online:
September 16, 2010
Citation
Bashash, S, Saeidpourazar, R, & Jalili, N. "Development of a High-Speed Laser-Free Atomic Force Microscopy." Proceedings of the ASME 2009 Dynamic Systems and Control Conference. ASME 2009 Dynamic Systems and Control Conference, Volume 1. Hollywood, California, USA. October 12–14, 2009. pp. 789-794. ASME. https://doi.org/10.1115/DSCC2009-2742
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