This paper presented an H∞-controller design to achieve active damping for a MEMS microphone system. The parametric uncertainties introduced by linearization process were modeled. The stability and performance of the closed-loop system were analyzed for the uncertain microphone model and both were shown to be robust. The nonlinear simulation further verifies that the controller offers the desired performance.
- Dynamic Systems and Control Division
Robust Controller Design to Achieve Active Damping for a MEMS Microphone
Qu, J, Miles, RN, & Wu, NE. "Robust Controller Design to Achieve Active Damping for a MEMS Microphone." Proceedings of the ASME 2008 Dynamic Systems and Control Conference. ASME 2008 Dynamic Systems and Control Conference, Parts A and B. Ann Arbor, Michigan, USA. October 20–22, 2008. pp. 971-978. ASME. https://doi.org/10.1115/DSCC2008-2235
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