Robust Controller Design to Achieve Active Damping for a MEMS Microphone

This paper presented an H_∞-controller design to achieve active damping for a MEMS microphone system. The parametric uncertainties introduced by linearization process were modeled. The stability and performance of the closed-loop system were analyzed for the uncertain microphone model and both were shown to be robust. The nonlinear simulation further verifies that the controller offers the desired performance.