Adaptive Stabilization of MEMS Relays

An adaptive nonlinear stabilizer is introduced for uncertain, voltage-controlled, microelectromechanical system (MEMS) relays. The control construction follows a Lyapunov approach, and is based on a nonlinear dynamic model applicable to the two types of MEMS relays—electrostatic and electromagnetic. The adaptive stabilizer compensates for parametric uncertainty in all mechanical parameters and selected electrical parameters while ensuring asymptotic regulation of the electrode opening and closing. Simulations demonstrate the performance of the adaptive control scheme in comparison to the typical open-loop operation of the MEMS relay.