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Proceedings Papers

Hermeticity Assessment of MEMS Micro Packages: Leak Rate Measurements Based on Infrared Spectroscopy

David Veyrie´, Djemel Lellouchi, Jean-Luc Roux, Francis Pressecq, Ange´lique Tetelin, Claude Pellet
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 281-286, August 27–September 1, 2006
Paper No: CANEUS2006-11039
DOI: https://doi.org/10.1115/CANEUS2006-11039
View Paper titled, Hermeticity Assessment of MEMS Micro Packages: Leak Rate Measurements Based on Infrared Spectroscopy
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Topics: Infrared spectroscopy, Leakage, Microelectromechanical systems, Pressure, Absorption, Cavities, Coating processes, Coatings, Dimensions, Fourier transform infrared spectroscopy
Proceedings Papers

Studies of Carbon Nanotube Based Composites for Aerospace Applications

S. Bellucci, F. Micciulla, C. Balasubramanian, A. Grilli, G. Rinaldi
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 1-7, August 27–September 1, 2006
Paper No: CANEUS2006-11001
DOI: https://doi.org/10.1115/CANEUS2006-11001
View Paper titled, Studies of Carbon Nanotube Based Composites for Aerospace Applications
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Topics: Aerospace industry, Carbon nanotubes, Composite materials, Epoxy resins, Electrical resistivity, Electron microscopes, Biomedicine, Circuits, Electric arcs, Electrical properties
Proceedings Papers

High Temperature (800°C) MEMS Pressure Sensor Development Including Reusable Packaging for Rocket Engine Applications

So¨ren Fricke, Alois Friedberger, Thomas Ziemann, Eberhard Rose, Gerhard Mu¨ller, Dimitri Telitschkin, Stefan Ziegenhagen, Helmut Seidel, Ulrich Schmid
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 287-291, August 27–September 1, 2006
Paper No: CANEUS2006-11042
DOI: https://doi.org/10.1115/CANEUS2006-11042
View Paper titled, High Temperature (800°C) MEMS Pressure Sensor Development Including Reusable Packaging for Rocket Engine Applications
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Topics: High temperature, Microelectromechanical systems, Packaging, Pressure sensors, Rocket engines, Sensors, Temperature, Electrical resistivity, Membranes, Sapphire
Proceedings Papers

Environmental Chamber for Temperature and Pressure Investigations on MEMS Devices

Djemel Lellouchi, Jean-Luc Gauffier, Xavier Lafontan, Patrick Pons, Petra Schmitt, Francis Pressecq, Je´re´mie Dhennin
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 275-279, August 27–September 1, 2006
Paper No: CANEUS2006-11026
DOI: https://doi.org/10.1115/CANEUS2006-11026
View Paper titled, Environmental Chamber for Temperature and Pressure Investigations on MEMS Devices
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Topics: Microelectromechanical systems, Pressure, Temperature, Pressure testing, Testing
Proceedings Papers

Silicon MEMS Pressure Sensors for Aerospace Applications

Martin Nese, Bjo̸rn Erik Seeberg
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 195-198, August 27–September 1, 2006
Paper No: CANEUS2006-11044
DOI: https://doi.org/10.1115/CANEUS2006-11044
View Paper titled, Silicon MEMS Pressure Sensors for Aerospace Applications
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Topics: Aerospace industry, Microelectromechanical systems, Pressure sensors, Silicon, Pressure, Stress, Temperature, Bonding, Bridges (Structures), Compressive stress
Proceedings Papers

Development of MEMS-Based Components and Subsystems for Spacecraft Propulsion

Pelle Rangsten, Tor-Arne Gro¨nland, Ha˚kan Johansson, Kerstin Jonsson, Johan Bejhed, Mattias Carlqvist
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 249-256, August 27–September 1, 2006
Paper No: CANEUS2006-11079
DOI: https://doi.org/10.1115/CANEUS2006-11079
View Paper titled, Development of MEMS-Based Components and Subsystems for Spacecraft Propulsion
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Topics: Microelectromechanical systems, Propulsion, Space vehicles, Satellites, Flight, Flow control, Pressure, Valves, Electric propulsion, Electronics