MEMS Reliability Assessment Methodology for Aerospace Applications

This paper presents a new dynamic and parametric model of a capacitive micro-electromechanical switch electro-statically actuated. It is built of elementary electrical equivalent-circuit blocks constructed of voltage controlled current sources. The model describes the nonlinear mechanical behaviour of the membrane movement, which allows the computation of the bridge capacitance. It can be inserted as a model to perform simulations as parasitic effects on MEMS structures. All switch parameters such as dimensions and material properties are adjustable.