Bending tests on suspended parts of MicroElectroMechanical System (MEMS) can be achieved thanks to nanoindentation techniques. The paper presents the main difficulties met when performing such a test, and shows how they can be reduced by experimental ways. An application is realized on gold bridges, with a validation of some theoretical assumptions.
MEMS Reliability: Accurate Measurements of Beam Stiffness Using Nanoindentation Techniques
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Seguineau, C, Desmarres, J, Dhennin, J, Lafontan, X, & Ignat, M. "MEMS Reliability: Accurate Measurements of Beam Stiffness Using Nanoindentation Techniques." Proceedings of the CANEUS 2006: MNT for Aerospace Applications. CANEUS2006: MNT for Aerospace Applications. Toulouse, France. August 27–September 1, 2006. pp. 301-308. ASME. https://doi.org/10.1115/CANEUS2006-11057
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