Environmental Chamber for Temperature and Pressure Investigations on MEMS Devices

In this paper, we present a new tool developed for environmental testing of MEMS: the EMA (Environmental MEMS Analyzer) 3D. Based on white light profilometry coupled with an environmental chamber, it permits large temperature scale and different pressure testing. This system has been used to characterize the environmental behavior of two types of RF MEMS, from −20 to 200°C.