Application of MEMS Technology to a Lightwave Antenna for Communication in Space and Aeronautics

This paper reports a novel MEMS (Micro Electro Mechanical Systems) lightwave (optical) antenna as a telecommunication device in space and aeronautics. The high performance antenna at light wave frequency requires optimal curved surfaces and high mechanical precision to acquire high aperture efficiency. We have developed a novel micro lightwave antenna by applying MEMS (Micro Electro Mechanical Systems) technology. The antenna of transparent type (lens) is fabricated as a trial antenna, which has a 3-level step structure with diameter of 4 mm, to show the advantage of the antenna. The characteristics of the fabricated antenna have been measured. The measurement results of gain and power radiation pattern are in agreement with simulation result.