Non-powered MEMS trajectory sensors based on a mass-spring-damped system have been designed and fabricated. The damping coefficient is provided by the displacement of a micro-piston in a chamber filled with a fluid.

Volume Subject Area:
Systems and Sub-Systems
Topics:
Design, Manufacturing, Microelectromechanical systems, Sensors, Trajectories (Physics), Damping, Displacement, Fluids, Pistons, Springs
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