A new concept of one shot micro-switches is proposed. Different switches have been developed to achieve either ON-OFF switching or OFF-ON switching. They are based on electrothermal mechanisms. ON-OFF switching consists in breaking an electrical connection using energetic material or low melting point metal like aluminum. OFF-ON switching consists in micro-soldering locally two electrical connections. Switches commute with a few hundred of mW and do not need energy to stay in the stable OFF or ON state. These switches are particularly adapted to spatial redundancy applications that need high quality contact and reliable commutation even after long time storage. The fabrication process of these switches is based on classic MEMS technology steps (LPCVD, PECVD, copper electrodeposition, lift-off and plasma etching) and is IC compatible. Fabrication yield reaches 99%.
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CANEUS 2006: MNT for Aerospace Applications
August 27–September 1, 2006
Toulouse, France
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4254-1
PROCEEDINGS PAPER
MEMS Based One Shot Electro-Thermal Micro-Switches for System Reconfiguration
Pierre Pennarun,
Pierre Pennarun
LAAS-CNRS, Toulouse, France
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Denis Lagrange
Denis Lagrange
LAAS-CNRS, Toulouse, France
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Pierre Pennarun
LAAS-CNRS, Toulouse, France
Carole Rossi
LAAS-CNRS, Toulouse, France
Daniel Esteve
LAAS-CNRS, Toulouse, France
Denis Lagrange
LAAS-CNRS, Toulouse, France
Paper No:
CANEUS2006-11018, pp. 105-110; 6 pages
Published Online:
August 15, 2008
Citation
Pennarun, P, Rossi, C, Esteve, D, & Lagrange, D. "MEMS Based One Shot Electro-Thermal Micro-Switches for System Reconfiguration." Proceedings of the CANEUS 2006: MNT for Aerospace Applications. CANEUS2006: MNT for Aerospace Applications. Toulouse, France. August 27–September 1, 2006. pp. 105-110. ASME. https://doi.org/10.1115/CANEUS2006-11018
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