High resolution electron imaging of biological assemblies such as proteins, viruses, and cells are important for biomedical diagnosis and drug discovery. We report on the design of a new CMOS direct-detection camera system for electron imaging. The active pixel sensor array includes 512 by 550 pixels, each 5 by 5 μm in size, with a ~8 μm epitaxial layer to achieve an effective fill factor of 100%. Spatial resolution of 2.3 μm for a single incident e- has been measured. A sample image of a mouse’s muscle cell is presented.

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